Method of forming embedded source or drain region of transistor with laterally extended portion

ABSTRACT

In some embodiments, in a method, a body structure with a gate structure configured thereon is provided. The gate structure comprises a gate side wall traversing the body structure. A spacer is formed over the gate side wall. A first recess is formed in the body structure. The first recess is formed beside the spacer and extending laterally under the spacer. A recess extension is formed under the first recess to extend a vertical depth of the first recess. Stressor material with a lattice constant different from that of the body structure is grown such that the extended first recess is filled.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of application Ser. No. 14/163,391,filed on Jan. 24, 2014, U.S. Pat. No. 10,164,107, which is incorporatedby reference in its entirety.

TECHNICAL FIELD

The present disclosure is generally related to an embedded source ordrain region of a transistor with a laterally extended portion.

BACKGROUND

Field effect transistors (FETs) introduced with mechanical stressapplied to channel regions have enhanced driving strength due toincreased carrier mobility in the channel regions. In some approaches,in an FET, source and drain regions on opposite sides of a gate includestressor regions embedded in a body structure. Lattice mismatch betweenthe material of a channel region and the material of the embeddedstressor regions causes mechanical stress applied to the channel region.The magnitude of the mechanical stress is dependent on the proximity ofthe embedded stressor regions to the channel region, and the volumes ofthe embedded stressor regions. However, when forming recesses in thebody of the FET in which the stressor material is to be grown, theprofiles of the recesses is dependent on a loading effect of neighboringgeometry which can vary from a FET to FET, thereby resulting innon-uniformity of device performance.

BRIEF DESCRIPTION OF THE DRAWINGS

The details of one or more embodiments of the disclosure are set forthin the accompanying drawings and the description below. Other featuresand advantages of the disclosure will be apparent from the description,drawings and claims.

FIG. 1A is a schematic perspective diagram of a FinFET structure havingsource and drain regions containing epitaxially grown stressor materialin accordance with some embodiments.

FIGS. 1B and 1C are schematic cross-sectional diagrams along a line A-A′and a line B-B′ in FIG. 1A, respectively, in accordance with someembodiments.

FIG. 2 is a flow chart of a method for forming an FET structure withsource and drain regions containing epitaxially grown stressor materialin accordance with some embodiments.

FIG. 3A is a schematic perspective diagram of a semiconductor structurewith a sacrificial gate structure straddling a body structureimplemented as a fin in accordance with some embodiments.

FIGS. 3B and 3C are a schematic cross-sectional diagrams along a lineC-C′ and a line D-D′ in FIG. 3A in accordance with some embodiments.

FIG. 4 is a schematic cross-sectional diagram illustrating spacersformed over the gate side walls in accordance with some embodiments.

FIGS. 5 to 8 are schematic cross-sectional diagrams illustrating theformation of the source or drain region and the shared source or drainregion in accordance with some embodiments.

FIGS. 9 to 11 are schematic cross-sectional diagrams illustratingreplacement of sacrificial gate materials with gate materials inaccordance with some embodiments.

FIG. 12 is a schematic cross-sectional diagram of a semiconductorstructure formed by the operation 206 described with reference to FIG. 2in accordance with other embodiments.

FIG. 13 is a schematic cross-sectional diagram of a semiconductorstructure during the operation 208 described with reference to FIG. 2 inaccordance with other embodiments.

FIG. 14 is a schematic cross-sectional diagram of a semiconductorstructure formed by the operation 208 described with reference to FIG. 2in accordance with other embodiments.

FIG. 15 is a schematic cross-sectional diagram of a MOSFET structurehaving source and drain regions containing epitaxially grown stressormaterial in accordance with some embodiments.

FIGS. 16 to 19 are schematic cross-sectional diagrams illustratingsemiconductor structures after each operation of a method for formingthe MOSFET structure in FIG. 15 in accordance with some embodiments.

Like reference symbols in the various drawings indicate like elements.

DETAIL DESCRIPTION

Embodiments, or examples, of the disclosure illustrated in the drawingsare now described using specific languages. It will nevertheless beunderstood that no limitation of the scope of the disclosure is therebyintended. Any alterations and modifications in the describedembodiments, and any further applications of principles described inthis document are contemplated as would normally occur to one ofordinary skill in the art to which the disclosure relates. Referencenumbers may be repeated throughout the embodiments, but this does notnecessarily require that feature(s) of one embodiment apply to anotherembodiment, even if they share the same reference number. It will beunderstood that when a feature is “formed over” another feature or asubstrate, intervening features may be present. Furthermore, the terms“top” and “bottom” and the like are used to describe a relative distanceof a feature with respect to a surface of a substrate over which thefeature is formed being larger and smaller, or under which the featureis formed being smaller and larger, respectively, and are not intendedto limit the scope of the embodiments to any particular orientation.

Some embodiments have one or a combination of the following featuresand/or advantages. In some embodiments, a source or drain region withstressor material to create mechanical stress to a channel region has afirst region and a second region embedded in a body structure. The firstregion extended laterally under a spacer by a gate structure. The secondregion extends a vertical depth of the first region. In someembodiments, a recess in which the first region is formed is created bya process less susceptible to loading effects. A recess extension inwhich the second region is formed is created by a process more optimizedwith respect to reaching the total vertical depth for a desired volumeof the source or drain region. Therefore, a proximity of the source ordrain region to the channel region is enhanced and is more stable.Further, the process for producing the desired total vertical depth canbe optimized separately from the process for controlling the proximityof the source or drain region to the channel region.

FIG. 1A is a schematic perspective diagram of a FinFET structure 10having source and drain regions 142 and 144 containing epitaxially grownstressor material in accordance with some embodiments. FIGS. 1B and 1Care schematic cross-sectional diagrams along a line A-A′ and a line B-B′in FIG. 1A, respectively, in accordance with some embodiments. FIG. 1Aillustrates relative orientations of the substrate 112, a body structure122, a gate structure 132 and the source and drain regions 142 and 144in the FinFET structure 10. FIG. 1B illustrates the cross-section of thebody structure 122 along a width W_(g1) of the gate structure 132. FIG.1C illustrates a cross-section of the source and drain regions 142 and144 and the body structure 122 along a length L_(g1) of the gatestructure 132.

Referring to FIG. 1A, the FinFET structure 10 includes a substrate 112,the body structure 122, dielectric isolation regions 114, the gatestructure 132 with spacers 1344, and source and drain regions 142 and144. In some embodiments, the substrate 112 is a bulk semiconductorsubstrate in a crystalline structure, such as a bulk silicon substrate.The substrate 112 has a top surface 112A (labeled at the level of thetop surface).

In some embodiments, the body structure 122 includes a fin structureprotruding from the surface 112A of the substrate 112. Referring to FIG.1B, in some embodiments, the cross section of the body structure 122along the width W_(g1) of the gate structure 132 has a vertical profilefrom the surface 112A to the top of the body structure 122. The verticalprofile of the body structure 122 is exemplary. For example, the crosssection of the body structure 122 along the width W_(g1) of the gatestructure 132 can have a tapered profile from the surface 112A to thetop surfaces 114A of the dielectric isolation region 114, or a taperedprofile from the surface 112A to the top of the body structure 122. Insome embodiments, the body structure 122 has the same material as thesubstrate 112 and has, for example, the crystalline structure ofsilicon.

Referring to FIG. 1A, in some embodiments, dielectric isolation regions114 such as shallow trench isolations (STIs) are formed on the surface112A of the substrate 112 and surrounding the body structure 122. Thedielectric isolation regions 114 have top surfaces 114A. Referring toFIG. 1B, the body structure 122 extends above the top surfaces 114A ofthe dielectric isolation regions 114. In some embodiments, thedielectric isolation regions 114 includes silicon oxide, siliconnitride, silicon oxy-nitride, fluoride-doped silicate (FSG), and/or asuitable low-k dielectric material.

Referring to FIG. 1A, in some embodiments, the gate structure 132 isformed on the top surfaces 114A of the dielectric isolation regions 114and traverses a portion of the body structure 122. Referring to FIG. 1B,along the width W_(g1) of the gate structure 132, the gate structure 132traverses the body structure 122 and wraps around the body structure122. In some embodiments, the gate structure 132 includes a gatedielectric layer 1322 which wraps around the body structure 122conformally, and a gate electrode 1324 that caps over the gatedielectric layer 1322. In some embodiments, the gate dielectric layer1322 includes a high-k dielectric material such as HfO₂, HfErO, HfLaO,HfYO, HfGdO, HfAlO, HfZrO, HfTiO, HfTaO, ZrO₂, Y₂O₃, La₂O₅, Gd₂O₅, TiO₂,Ta₂O₅, SrTiO, or combinations thereof. In some embodiments, the gateelectrode 1324 includes work function metal layers which are conformallyformed over the gate dielectric layer 1322 for adjusting a work functionof the gate electrode 1324, and a fill metal that caps over the workfunction metal layers serving as the main conductive portion of the gateelectrode 1324. Examples of work function metal layers include TaC, TaN,TiN, TaAlN, TaSiN, and combinations thereof. Examples of fill metalincludes W, Al, Cu, and combinations thereof. The layers in the gatestructure 132 are exemplary. The gate structure 132 with, for example,other layers, other coverage of the layers, different numbers of thelayers are within the contemplated scope of the present disclosure.

Referring to FIG. 1A, in some embodiments, the source and drain regions142 and 144 on opposite sides of the gate structure 132 includesepitaxially grown stressor material. Referring to FIG. 1C, the gatestructure 132 has opposite side walls 132A and 132B across the gatelength L_(g1) of the gate structure 132. The spacers 1344 are formed onthe side walls 132A and 132B of the gate structure 132. The source anddrain regions 142 and 144 are configured beside the spacers 1344 andhave regions that are embedded in the body structure 122, such as aregion 1442 and a region 1444, and a region beyond the body structure122, such as regions 1446. In some embodiments, the region 1444 extendslaterally under the spacer 1344, and the region 1442 is located underthe region 1444 and extends the vertical depth of the region 1444 sothat the region 1442 and the region 1444 has a total vertical depthD_(v). In some embodiments, the region 1444 protrudes laterally from theregion 1442. In some embodiments, the region 1444 of has a wall section1444A under the spacer 1344. The wall section 1444A tapers towards aplane in the body structure 122 aligned with the gate side wall 132Bfrom a bottom of the wall section 1444A to a top of the wall section1444A. The bottom of the wall section 1444A is aligned or more closelyaligned with a side wall 1344B of the spacer 1344, and the top of thewall section 1444A is aligned or more closely aligned with a side wall1344A of the spacer 1344. In the embodiments illustrated in FIG. 1C, theside wall 1344A of the spacer 1344 coincide with the gate side wall132B. In other embodiments to be described with reference to FIG. 5, theside wall 3344A of the spacer 3344 does not coincide with the gate sidewall 332B. The plane in the body structure 122 aligned with the gateside wall 132B is considered as one end of a channel region 1222 underthe gate structure 132. In some embodiments, the wall section 1444A hasa round profile. In some embodiments, the region 1442 has anelliptical-shaped profile. In some embodiments, the region 1446 beyondthe body structure 122 have facets 1446A (also labeled in FIG. 1A). Inthe beginning of the epitaxial growth of the source and drain regions142 and 144, facets may not be fully established. However, with theproceeding of the epitaxial growth, due to different epitaxial growthrates on different surface planes, facets are gradually formed.

In some embodiments, the stressor material grown in the source and drainregions 142 and 144 has a lattice constant different from that of thebody structure 122. In some embodiments, the FinFET structure 10(labeled in FIG. 1A) is a p-type FET, and the stressor material grown inthe source and drain regions 142 and 144 has a lattice constant largerthan that of the body structure 122 to apply a compressive stress on thechannel region 1222 in the body structure 122. In some embodiments, thebody structure 122 is made of silicon (Si), and the stressor material issilicon germanium (SiGe). In other embodiments, the FinFET structure 10is an n-type FET, and the stressor material grown in the source anddrain regions 142 and 144 has a lattice constant smaller than that ofthe body structure 122 to apply a tensile stress on the channel region1222 in the body structure 122. In some embodiments, the body structure122 is made of Si, and the stressor material is silicon phosphide (Si:P)or silicon carbide (Si:C).

A distance between, for example, the source or drain region 144 embeddedin the body structure 122 and the gate side wall 132B is defined as aproximity of the source or drain region 144 to the channel region 1222under the gate structure 132. The closer the proximity of the source ordrain region 144 to the channel region 1222 is, the greater themechanical stress to the channel region 1222 is, and the higher thecarrier mobility enhancement is. By forming the region 1444 extendedlaterally under the spacer 1344, the proximity of the source or drainregion 144 to the channel region 1222 under the gate structure 132 isimproved. Further, the mechanical stress applied to the channel region1222 is dependent on the volume of the source or drain region 144, whichdepends on the total vertical depth D_(v) of the region 1442 and theregion 1444. By forming distinct regions 1444 and 1442 for enhancing theproximity effect and the volume effect, respectively, the optimizationof the processes for forming the regions 1444 and 1442 can be separated.

FIG. 2 is a flow chart of a method 200 for forming an FET structure withsource and drain regions containing epitaxially grown stressor materialin accordance with some embodiments. In operation 202, a body structurewith a gate structure configured thereon is provided. In operation 204,a spacer is formed over a gate side wall of the gate structure. Inoperation 206, a recess beside the spacer and extending laterally underthe spacer is formed in the body structure. In operation 208, a recessextension is formed under the recess to extend a vertical depth of therecess. In operation 210, stressor material with a lattice constantdifferent from that of the body structure is grown in the extendedrecess.

FIGS. 3 to 11 are schematic diagrams illustrating semiconductorstructures after each operation of a method for forming the FinFETstructure 10 in FIG. 1A in accordance with some embodiments. The methodillustrated in FIGS. 3 to 11 provides further details to the methoddescribed with reference to FIG. 2. In operation 202, a body structurewith a gate structure configured thereon is provided. FIG. 3A is aschematic perspective diagram of a semiconductor structure 30 with asacrificial gate structure 332 straddling a body structure 322implemented as a fin in accordance with some embodiments. In someembodiments, the body structure 322 protruding from a surface 112A of asubstrate 112 is formed by etching trenches in a bulk semiconductorsubstrate. The surface 112A is located at a level of the bottom surfacesof the trenches. Between the trenches is the body structure 322extending from the surface 112A of the substrate 112. Further, thetrenches are filled with dielectric material as described withreferences to FIGS. 1A and 1B to form the dielectric isolation regions114. In some embodiments, the dielectric isolation regions 114 arefurther etched so that the body structure 322 extends beyond the topsurfaces 114A of the dielectric isolation regions 114. In otherembodiments, the portion of the body structure 122 extended beyond thetop surfaces 114A of the dielectric isolation regions 114 is epitaxiallygrown. FIGS. 3B and 3C are a schematic cross-sectional diagrams along aline C-C′ and a line D-D′ in FIG. 3A in accordance with someembodiments. In some embodiments, for forming the sacrificial gatestructure 332 straddling the body structure 322 in FIG. 3A, asacrificial gate layer to be patterned into a sacrificial gate electrode3322 illustrated in FIGS. 3B and 3C is blanket deposited over thesurface 114A (shown in FIG. 3B) and a portion of the exposed surfaces ofthe body structure 322 (shown in both FIGS. 3B and 3C). In otherembodiments, a sacrificial gate dielectric layer (not shown) is formedbetween the sacrificial gate layer and the body structure 322 to protectthe body structure 322 when the sacrificial gate layer is beingpatterned to form the sacrificial gate electrode 3322. Further, one ormore hard mask layers are formed on the sacrificial gate layer, and aphotoresist layer is formed on the one or more hard mask layers. Thelayers for forming the sacrificial gate structure 332 can be depositedusing any of the methods such as physical vapor deposition (PVD),plasma-enhanced chemical vapor deposition (PECVD), chemical vapordeposition (CVD), atomic layer deposition (ALD) or other methods deemedappropriate by those skilled in the art. Photolithography techniques areused to pattern the photoresist layer into a photoresist mask whichdefines an area where the sacrificial gate structure 332 (labeled inFIG. 3A) is desired. The area of the sacrificial gate structure 332 hasa gate width W_(g1) (shown n FIG. 3B) and a gate length L_(g1) (shown inFIG. 3C). The pattern of the photoresist mask is then transferred to theone or more hard mask layers to form the hard mask 3324 (shown in bothFIGS. 3B and 3C) which will not be significantly etched or eroded duringpatterning the sacrificial gate layer. Further, the pattern of the hardmask 3324 is transferred to the sacrificial gate layer to form asacrificial gate electrode 3322. The transferring of the pattern fromthe photoresist mask to the underlying layers is performed byanisotropic etching using suitable etching gases. Referring to FIG. 3C,the sacrificial gate structure 332 has vertical gate side walls 332A and332B across the gate length L_(g1). In some embodiments, the sacrificialgate electrode 3322 is formed of polysilicon, and the hard mask 3324includes SiO₂, Si₃N₄, or SiON. In other embodiments, the sacrificialgate electrode 3322 is formed of Si₃N₄ and the hard mask 3324 includesSiO₂, or SiON.

FIG. 4 to FIG. 11 are cross-sectional diagrams along the gate lengthL_(g1) (labeled in FIG. 3C). In operation 204, a spacer is formed over agate side wall of the gate structure. FIG. 4 illustrates spacers 3344formed over the gate side walls 332A and 332B in accordance with someembodiments. In some embodiments, a sealing layer 3342 is formed on gateside walls, including the gate side walls 332A and 332B, surrounding thesacrificial gate structure 332 (labeled in FIG. 3A). The sealing layer3342 protects the sacrificial gate structure 332 from damage or lossduring subsequent processing. In some embodiments, the sealing layerincludes Si₃N₄. Subsequently, in some embodiments, the spacers 3344 areformed on the sealing layer 3342. The spacers 3344 are used to controlthe offsets of the source and drain regions 142 and 144 (shown in FIG.1C) to the sacrificial gate structure 332 in order to obtain deviceperformance without production issues. Each spacer 3344 can include oneor more layers. In some embodiments, the spacers 3344 includes Si₃N₄,SiON, SiOCN, SiCN, or SiO₂. The sealing layer 3342 and the spacers 3344can be deposited using any of the methods such as PVD, PECVD, CVD, ALDor other methods deemed appropriate by those skilled in the art. Inother embodiments as illustrated in FIG. 1, the sealing layer 3342 isnot formed, and the spacers 1344 also serve to seal the gate structure132.

In some embodiments, the sacrificial gate structure 332 has a sharedsource or drain region 844 with an adjacent gate structure 352, asillustrated in FIG. 8. FIGS. 5 to 8 illustrate the formation of thesource or drain region 842 and the shared source or drain region 844 inaccordance with some embodiments. Because the formation of the sharedsource or drain region 844 is dependent on both the sacrificial gatestructure 332 and the adjacent gate structure 352, the shared source ordrain region 844 has a symmetrical profile. Nevertheless, the operationsdescribed with reference to FIGS. 5 to 8 are also applicable to theformation of the FinFET structure 10 illustrated in FIG. 1. Moreover,the semiconductor structure with source and drain regions withasymmetrical profiles as illustrated in FIG. 1, and with one or both ofthe source and drain regions with symmetrical profiles as illustrated inFIG. 8 are within the contemplated scope of the present disclosure.

In operation 206, a recess beside the spacer and extending laterallyunder the spacer is formed in the body structure. Referring to FIG. 5,in some embodiments, recesses 542 and 544 are formed in the bodystructure 322 beside the spacers 3344. The recesses 542 and 544 extendlaterally under the spacers 3344. In some embodiments, the recess 544 isformed between the sacrificial gate structure 332 and the adjacent gatestructure 352, and also extends laterally under the spacer 3544 of thegate structure 352.

In some embodiments, the recesses 542 and 544 are formed by isotropicetching. In some embodiments, wet etching is used to perform theisotropic etching. Because portions of the recesses 542 and 544 extendedlaterally under the spacers 3344 and 3544 are similar or symmetrical,the portion of the recess 544 extended laterally under the spacer 3344is used as an example for characterizing the profile of the recesses 542and 544. The recess 544 has a lateral depth D_(L1) under the spacer3344. In some embodiments, the lateral depth D_(L1) is within a range ofa first distance between a side wall 3344A and a side wall 3344B of thespacer 3344 at a level of a top surface 322A of the body structure 322,and a second distance between the side wall 3344A and the gate side wall332B at the level of the top surface 322A. In some embodiments, asurface 3344C of the spacer 3344 on the body structure 322 is exposed.In the embodiments shown in FIG. 5, the lateral depth D_(L1) extends upto the side wall 3344A of the spacer 3344. In other embodiments to bedescribed with reference to FIG. 12, the lateral depth D_(L2) furtherextends beyond the side wall 3344A and up to the gate side wall 332B. Inthe embodiments described with reference to FIG. 1C, because a sealinglayer is not formed between the gate structure 132 and the spacer 1344,the lateral depth extends up to the side wall 1344A which coincides withthe gate side wall 132B.

In some embodiments, the recess 544 has a wall section 544A under thespacer 3344. The wall section 544A tapers toward a plane in the bodystructure 322 aligned with the gate side wall 332B from a bottom of thewall section 544A to a top of the wall section 544A. The bottom of thewall section 544A is aligned or more closely aligned with the side wall3344B of the spacer 3344, and the top of the wall section 3344A isaligned or more closely aligned with the side wall 3344A of the spacer3344. In some embodiments, the wall section 544A under the surface 3344Cexposed by the recess 544 tapers toward a plane in the body structure322 aligned with the gate side wall 332B along a direction of exposureof the surface 3344C of the spacer 3344. The direction of exposure ofthe surface 3344C of the spacer 3344 is along the direction of lateraletching of the recess 544. In some embodiments, at the level of the topsurface 322A of the body structure 322, the wall section 544A is locatedwithin a region between the surface 3344C of the spacer 3344 and thegate side wall 332B.

In operation 208, a recess extension is formed under the recess toextend a vertical depth of the recess. Referring to FIG. 6, in someembodiments, to extend a vertical depth D_(v1) of the recesses 542 and544, etch rate control doping regions 642 and 644 are formed in the bodystructure 322. The doping regions 642 and 644 are formed beside thespacers 3344 and under the recesses 542 and 544, respectively. A dopantused in forming the doping regions 642 and 644 is chosen based on itsability to increase the etch rate of the body structure 322. Thespecific dopant used depends on the material of the body structure 322and an etchant used in a subsequent etching to form the recessextension. In some embodiments, the dopant is arsenic (As), phosphorous(P), or other suitable material. In some embodiments, ion implantationis used to perform doping. In some embodiments, As is used at a dosagethat ranges from 1×10¹⁴ to 5×10¹⁵ atoms/cm³. In some embodiments, As isused at a dosage of 3×10¹⁴ atoms/cm³. In some embodiments, As isimplanted at an ion energy of 2 to 10 keV

Referring to FIG. 7, in some embodiments, etching of the body structure322 is performed to form the recess extensions 742 and 744 with avertical depth D_(v2) so that an extended recess including the recess542 or 544 and the recess extension 742 or 744 has a total verticaldepth of D_(v1)+D_(v2). In some embodiments, the etching of the bodystructure 322 to form the recess extensions 742 and 744 uses etchantsthat complements the dopant used in the doping operation to increase theetch rate of the doping regions 642 and 644. Therefore, the verticaldepth of the doping regions 642 and 644 control the vertical depthD_(v2) of the recess extensions 742 and 744. In some embodiments,etching of the body structure 33 to form the recess extensions 742 and744 is performed using dry chemical etching such as plasma etching. Insome embodiments, the recess extension 744 has a symmetrical andelliptical-shaped profile. In other words, a vertical etch rate of therecess extension 744 is higher than a lateral etch rate of the recessextension 744. The recess extension 742 has an asymmetrical andelliptical-shaped profile. In some embodiments, the recess 542 or 544protrudes laterally from the recess extension 742 or 744.

In operation 210, stressor material with a lattice constant differentfrom that of the body structure is grown in the extended recesses. Theextended recess includes the recess 542 or 544 and the recess extension742 or 744 shown in FIG. 7. Referring to FIG. 8, in some embodiments,stressor material is grown in the extended recess and beyond theextended recess to form the source and drain regions 842 and 844. Insome embodiments, the stressor material is grown using a selectiveepitaxial deposition process. In some embodiments, the source or drainregion 844 has regions 8442 and 8444 that fill the extended recess, anda region 8446 extended beyond the extended recess. In accordance withthe profile of the extended recess, the region 8444 extends laterallyunder the spacer 3344, and the region 8442 is located under the region8444 and extends the vertical depth of the region 8444. The profile ofthe extended recess has been described with reference to FIG. 5. Theprofile of the region 8446 extended beyond the extended recess issimilar to the region 1446 described with reference to FIG. 1C exceptthe symmetry in profile resulted from the adjacent gate 352 describedwith reference to FIG. 5. The stressor material has been described withreference to FIGS. 1A and 1 s omitted here.

A proximity of the source or drain region 844 (shown in FIG. 8) to thegate side wall 332B is controlled by the lateral depth D_(L1) of therecess 544 (shown in FIG. 5), and a volume of the source or drain region844 is controlled by the vertical depth D_(v2) of the recess extension744 (shown in FIG. 7). By separating operations for forming the recess542 or 544, and the recess extension 742 or 744, the loading effectsthat occur during, for example, dry etching of the body structure 322 toform the recess extension 742 or 744 does not affect the proximity ofthe source or drain region 842 or 844 that has been established during,for example, wet etching of the body structure 322 to form the recess542 or 544. Therefore, the proximity of the source or drain region 842or 844 is more stable and less susceptible to loading effects. Further,the optimization of the operations for forming the recess 542 or 544 andthe recess extension 742 or 744 can be simplified since the operationfor forming the recess 542 or 544 can be optimized with respect to alateral etch rate, and the operation for forming the recess extension742 or 744 can be optimized with a vertical etch rate.

FIGS. 9 to 11 illustrate replacement of sacrificial gate materials withgate materials in accordance with some embodiments. For simplicity, thereplacement for the adjacent gate structure 352 is not illustrated.Referring to FIG. 9, in some embodiments, an inter-layer dielectric(ILD) layer 952 surrounding the sacrificial gate structure 332 and abutsthe spacers 3344 is formed. In some embodiments, the ILD layer 952 isblanket deposited over the surface 112A of the substrate 112 (labeled inFIG. 3A), and planarized until a top surface of the ILD layer 952 isplanar the hard mask 3324. The ILD layer 952 is formed of a materialwhereby the sacrificial gate structure 332 can be removed withoutaffecting the source or drain regions 842 and 844.

Referring to FIG. 10, in some embodiments, the hard mask 3324 and thesacrificial gate electrode 3322 shown in FIG. 9 are removed in sequence.Then, the patterned sacrificial gate dielectric layer, if exists, isremoved. Removal of the hard mask 3324 and the sacrificial gateelectrode 3322 exposes the underlying body structure 322 and forms anopening 10332 where the gate structure 132′ will be formed.

Referring to FIG. 11, in some embodiments, the gate structure 132′ isformed in the opening 10332 (shown in FIG. 10). In some embodiments, oneor more gate dielectric layers such as a gate dielectric layer 1324′ isconformally deposited on exposed surfaces of the body structure 332, andthe sealing layer 3342. In other embodiments, the gate dielectric layer(not shown) is thermally grown on the exposed surfaces of the bodystructure 332. As described with reference to FIG. 1B, the gatedielectric layer 1324′ includes a high-k dielectric material. The gatedielectric layer 1324′ can be formed by, for example, CVD or ALD. Thenthe gate electrode 1322′ filling the remaining portion of the opening10322 is formed. In some embodiments, the gate electrode 1322′ includeswork function metal layers and fill metal. In some embodiments, the workfunction metal layers are conformally deposited over the gate dielectriclayer 1324′ using, for example, CVD or ALD. Then, the fill metal capsover the work function metal layers using, for example, CVD, ALD orsputtering. The fill metal is further planarized until a top surface ofthe gate electrode 1322′ is planar the ILD layer 952. Exemplarymaterials for forming the work function metal layers and the fill metalhave been described with reference to FIG. 1B and are omitted here.

The embodiments described with references to FIGS. 1A to 1C and theembodiments described with references to FIGS. 3A to 11 are with respectto the gate structures 132 and 132′ formed with the replacement gateprocess. However, the present disclosure is not limited to the gatestructures 132 and 132′ formed using the replacement gate process. Insome embodiments, a gate structure having the same profile as the gatestructure 132 or 132′ is formed by a non-replacement gate process and isformed before the formation of the recesses 542 and 544 shown in FIG. 5.Some embodiments for a non-replacement gate process are described withreferences to FIGS. 15 to 19.

FIG. 12 is a schematic cross-sectional diagram of a semiconductorstructure formed by the operation 206 described with reference to FIG. 2in accordance with other embodiments. The cross-sectional diagram inFIG. 12 is along the gate length L_(g1) (labeled in FIG. 3C) of thesacrificial gate structure 332. Compared to the embodiments describedwith reference to FIG. 5, the recess 546 has a lateral depth D_(L2) thatextends up to the gate side wall 332B instead of the lateral depthD_(L1) that extends up to the side wall 3344A of the spacer 3344. Insome embodiments, in addition to the exposed surface 3344C of the spacer3344 by the recess 546, a surface (not labeled) of the sealing layer3342 beside the surface 3344C of the spacer 3344 is also exposed.Further, the recess 546 has a wall section 546A tapering toward a planein the body structure 322 aligned with the gate side wall 332B from aportion of the wall section 546A corresponding to the side wall 3344B ofthe spacer 3344 to a portion of the wall section 546A corresponding tothe gate side wall 332B. In some embodiments, the wall section 546Aunder the surface 3344C of the spacer 3344 and the surface of thesealing layer 3342 exposed by the recess 546 tapers toward a plane inthe body structure 322 aligned with the gate side wall 332B along adirection of exposure of the surface 3344C of the spacer 3344 and thesurface of the sealing layer 3342.

FIG. 13 is a schematic cross-sectional diagram of a semiconductorstructure during the operation 208 described with reference to FIG. 2 inaccordance with other embodiments. The cross-sectional diagram in FIG.13 is along the gate length L_(g1) (labeled in FIG. 3C) of thesacrificial gate structure 332. Compared to the embodiments describedwith reference to FIG. 6, dummy spacers 3346 are further formed on thespacer 3344 before forming doping regions 646 and 648. In someembodiments, a refractory metal silicide layer is formed over the sourceand drain regions 842 and 844 (shown in FIG. 8). A semiconductor filmlayer such as a silicon film layer may be formed between the source anddrain regions 842 and 844 and the silicide layer to, for example,provide enough silicon material to be used or consumed during theformation of a silicide layer. By forming the dummy spacers 3346, thegate structure 132′ shown in FIG. 11 is shielded from possible silicideencroachment during forming the silicide layer to minimize thepossibility of shortening of the gate structure 132′. In someembodiments, the dummy spacer 3346 includes Si₃N₄, SiOCN, SiON, SiCN, orSiO₂. In some embodiments, the dummy spacer 3346 is formed by any of themethods such as PVD, PECVD, CVD, ALD, or other methods deemedappropriate by those skilled in the art. In the embodimentsillustratively shown in FIG. 13, the doping regions 646 and 648.Therefore the doping regions 642 and 646 are formed beside the dummyspacers 3346.

FIG. 14 is a schematic cross-sectional diagram of a semiconductorstructure formed by the operation 208 described with reference to FIG. 2in accordance with other embodiments. The cross-sectional diagram inFIG. 14 is a long the gate length L_(g1) (labeled in FIG. 3C) of thesacrificial gate structure 332. Compared to the embodiments describedwith references to FIGS. 6 and 7 which form doping regions 642 and 644to enhance the etch rate of, for example, dry chemical etching to formthe recess extensions 742 and 744, recess extensions 746 and 748 in FIG.14 are formed using reactive ion etching which involves inducingchemical reaction at a surface to be etched by impinging ions,electrons, or photons. The recess extensions 746 and 748 formed byreactive ion etching has a rectangular-shaped profile which is moreanisotropic than the recess extensions 742 and 744 formed by doping anddry chemical etching.

FIG. 15 is a schematic cross-sectional diagram of a MOSFET structure 20having source and drain regions 242 and 244 containing epitaxially grownstressor material in accordance with some embodiments. The MOSFETstructure 20 includes a body structure 214, dielectric isolation regions216, a gate structure 222 with spacers 232, and source and drain regions242 and 244.

In some embodiments, the MOSFET structure 20 includes a p-type FET. Thebody structure 214 is an N-well region in a p-type substrate 212. Insome embodiments, the substrate 212 is a bulk semiconductor substrate ina crystalline structure, such as a bulk silicon substrate. The substrate212 is doped with p-type dopants to form the p-type substrate. A regionin the substrate 212 is further doped with n-type dopants such asphosphorous (P) and arsenic (As) to form the N-well region. In otherembodiments, the body structure (not shown) is an n-type substrate. Insome embodiments, the MOSFET structure (not shown) includes an n-typeFET. The body structure is the p-type substrate 212.

In some embodiments, the gate structure 222 is formed on the bodystructure 214. The gate structure 222 includes a gate dielectric layer2222 formed on the body structure 214 and a gate electrode 2224 formedon the gate dielectric layer 2222. In some embodiments, the gatedielectric layer 2222 includes a high-k dielectric material as describedwith reference to FIG. 1A. In some embodiments, the gate electrode 2224includes one or more layers such as work function metal layers and ametal layer similar to the work function metal layers and the fill metalin the gate electrode 1324 described with reference to FIG. 1A,respectively.

In some embodiments, the dielectric isolations regions 216 are formed attwo ends of a boundary of the body structure 214 to isolate the MOSFETstructure 20. In some embodiments, the dielectric isolation regions 216includes similar material as the dielectric isolation region 114described with reference to FIG. 1B.

In some embodiments, the source and drain regions 242 and 244 containingepitaxially grown stressor material are configured on opposite sides ofthe gate structure 222 and abut the dielectric isolation regions 216. Insome embodiments, the gate structure 222 has opposite side walls 222Aand 222B across a gate length L_(g2) of the gate structure 132. Spacers232 are formed on the side walls 222A and 222B of the gate structure222. The source and drain regions 242 and 244 are configured beside thespacers 232 and have regions that are embedded in the body structure214, such as a region 2442 and a region 2444, and a region beyond thebody structure 214, such as a region 2446. The regions 2442, 2444 and2446 in FIG. 15 are similar to the regions 1442, 1444 and 1446 describedwith reference to FIG. 1C. One of the differences between the region1446 and the region 2446 is that the region 1446 has anelliptical-shaped profile while the region 2446 has a diamond-shapedprofile. A wall section of the diamond-shaped profile forming a vertexwith a wall section 2442A of the diamond-shaped profile is replaced by awall section 2444A of the region 2444. The wall section 2444A is underthe spacer 232 and tapers towards a plane in the body structure 214aligned with the gate side wall 222B from a bottom of the wall section2444A to a top of the wall section 2444A. The bottom of the wall section2444A is aligned or more closely aligned with a side wall 232B of thespacer 232, and the top of the wall section 2444A is aligned or moreclosely aligned with a side wall 232A of the spacer 232. Therefore, thewall section 2444A has a closer proximity to the channel region 2222than the replaced wall section forming the vertex with the wall section2442A of the diamond-shaped profile. The stressor material forming thesource and drain regions 242 and 244 are similar to that forming thesource and drain regions 142 and 144 described with reference to FIG. 1Cand are omitted here.

FIGS. 16 to 19 and FIG. 15 are schematic cross-sectional diagramsillustrating semiconductor structures after each operation of a methodfor forming the MOSFET structure 20 in FIG. 15 in accordance with someembodiments. The method illustrated in FIGS. 16 to 19 and FIG. 15provide further details to the method described with reference to FIG.2. In operation 202, a body structure with a gate structure configuredthereon is provided. Referring to FIG. 16, in some embodiments, the bodystructure 214 is a well region in the substrate 212. The substrate 212is doped with one conductivity type such as p type while the bodystructure 214 is doped with an opposite conductivity type such as ntype. Trenches are formed at two ends of a boundary of the bodystructure 214, and are filled with one or more dielectric materials toform the dielectric isolation regions 216. Compared to the gatestructure 132′ (shown in FIG. 11) which is formed by a replacement gateprocess, the gate structure 222 is formed by a non-replacement gateprocess. A gate dielectric layer is blanket deposited on the substrate212 and one or more metal layers are deposited on the gate dielectriclayer. In some embodiments, the gate dielectric layer and one or moremetal layers are deposited using CVD, ALD, or other deposition methodsdeemed appropriate by those skilled in the art. The materials of thegate dielectric layer and the one or more metal layers are similar tothose described with reference to FIG. 1B and are omitted here. In orderto pattern the gate dielectric layer and the one or more metal layersinto the gate dielectric layer 2222 and the gate electrode 2224, aphotoresist layer is deposited over the one or more metal layers andpatterned into a photoresist mask that defines the desired area of thegate structure 222. The pattern of the photoresist mask is thentransferred to the underlying one or more metal layers and the gatedielectric layer. In some embodiments, a hard mask is formed on the oneor more metal layers to facilitate transferring of the pattern definedby the photoresist layer and to protect the gate electrode 222 frombeing affected by subsequent processing operations. In some embodiments,the transferring of the pattern from the photoresist mask to theunderlying layers is performed by anisotropic etching. The formed gatestructure 222 has vertical gate side walls 222A and 222B across the gatelength L_(g2).

In operation 204, a spacer is formed over a gate side wall of a gatestructure. Referring to FIG. 17, in some embodiments, the spacer 232 isformed on the gate side walls 222A and 222B of the gate structure 222.Each spacer 232 can include one or more layers. In some embodiments,material and a method for forming the spacers 232 are similar to thoseof the spacers 3344 described with reference to FIG. 4.

In operation 206, a recess beside the spacer and extending laterallyunder the spacer is formed in the body structure. Referring to FIG. 18,in some embodiments, recesses 2842 and 2844 are formed in the bodystructure 214 between the spacers 232 and the dielectric isolationregions 216. The recesses 2842 and 2844 extend laterally under thespacers 232. The recesses 2842 and 2844 are formed similarly as therecesses 542 and 544 described with reference to FIG. 5.

In operation 208, a recess extension is formed under the recess toextend a vertical depth of the recess. Referring to FIG. 19, in someembodiments, a vertical depth D_(v3) of the recess 2844 is extended by arecess extension 2944 with a vertical depth D_(v4) so that an extendedrecess has a total vertical depth of D_(v3)+D_(v4). In some embodiments,the recess extension 2944 is formed by a dry etch first to reach thevertical depth D_(v4) with respect to the recess 2844, and then by ananisotropic wet etch to form the diamond-shaped profile. Anisotropic wetetching is also known as orientation-dependent wet etching which hasdifferent etch rate along different crystal directions. In someembodiments, the recess extensions 2942 and 2944 are formed such thatthe recesses 2842 and 2844 protrude laterally from the recess extensions2942 and 2944. Although the recess extensions 744 and 748 for the FinFETstructure described with references to FIGS. 7 and 14 have theelliptical-shaped profile and the rectangular-shaped profile, and therecess extension 2944 for the MOSFET structure described with referenceto FIG. 19 has the diamond-shaped profile, the elliptical-shaped andrectangular-shaped profiles are applicable to the MOSFET structure, andthe diamond-shaped profile is applicable to the FinFET structure.

In operation 210, stressor material with a lattice constant differentfrom that of the body structure is grown in the extended recess. Theextended recess includes the recess 2842 or 2844 and the recessextension 2942 or 2944 shown in FIG. 19. Referring to FIG. 15, in someembodiments, stressor material is grown in the extended recess andbeyond the extended recess to form the source and drain regions 242 and244. The method for growing the stressor material and the stressormaterial are similar to those described with reference to FIG. 8 andFIG. 1C, and are omitted here.

Similar to the method described with references to FIGS. 3A to 11, aproximity of the source or drain region 242 or 244 (shown in FIG. 15) tothe gate side wall 222A or 222B and a volume of the source or drainregion 242 or 244 are controlled separately by the operation for formingthe recess 2842 or 2844 (shown in FIG. 18) and the operation for formingthe recess extension 2942 or 2944 (shown in FIG. 19). Therefore, theproximity of the source or drain region 242 or 244 to the channel region2142 (shown in FIG. 15) is stable. Further, optimization of theoperations for forming the recess 2842 or 2844 and the recess extension2942 or 2944 can be directed to a lateral etch rate, and a vertical etchrate, respectively.

In some embodiments, in a method, a body structure with a gate structureconfigured thereon is provided. The gate structure comprises a gate sidewall traversing the body structure. A spacer is formed over the gateside wall. A first recess is formed in the body structure. The firstrecess is formed beside the spacer and extending laterally under thespacer. A recess extension is formed under the first recess to extend avertical depth of the first recess. Stressor material with a latticeconstant different from that of the body structure is grown such thatthe extended first recess is filled.

In some embodiments, in a method, a body structure with a gate structureconfigured thereon is provided. The gate structure comprises a gate sidewall traversing the body structure. A spacer is formed over the gateside wall. A first recess is formed in the body structure. The firstrecess is formed beside the spacer such that a surface of the spacercovered by the body structure is exposed. Stressor material with alattice constant different from that of the body structure is grown suchthat the extended first recess is filled.

In some embodiments, a semiconductor structure includes a bodystructure, a gate structure, a spacer and a source or drain region. Thegate structure is configured on the body structure. The gate structurecomprises a gate side wall traversing the body structure. The source ordrain region is embedded in the body structure beside the gatestructure. The source or drain region contains stressor material with alattice constant different from that of the body structure. The sourceor drain region comprises a first region and a second region. The firstregion extends laterally under the spacer. The second region isconfigured under the first region and extends a vertical depth of thefirst region.

The above description includes exemplary operations, but theseoperations are not necessarily required to be performed in the ordershown. Operations may be added, replaced, changed order, and/oreliminated as appropriate, in accordance with the spirit and scope ofthe disclosure. Accordingly, the scope of the disclosure should bedetermined with reference to the following claims, along with the fullscope of equivalences to which such claims are entitled.

What is claimed is:
 1. A method, comprising: providing a body structurewith a gate structure configured thereon, the gate structure comprisinga gate side wall; forming a spacer over the gate side wall; forming afirst recess in the body structure by etching a portion of the bodystructure, the first recess being formed beside the spacer and extendinglaterally under the spacer, and the etched portion of the body structureoverall having a substantially the same doping concentration asneighboring body structure around the etched portion of the bodystructure; forming a recess extension under the first recess, including:forming a dummy spacer on the spacer; forming an etch rate controldoping region in the body structure under the first recess and besidethe spacer to increase an etch rate of the etch rate control dopingregion; and etching the body structure to form the recess extension; andgrowing stressor material with a lattice constant different from that ofthe body structure such that the extended first recess is filled.
 2. Themethod of claim 1, wherein the dummy spacer is free from covering a sidewall of the first recess, and: providing a body structure with a gatestructure configured thereon comprises: providing the body structurecomprising a fin structure; and forming the gate structure wrappingaround a portion of the fin structure.
 3. The method of claim 1,wherein: forming a first recess in the body structure comprises:isotropic etching the body structure until reaching a lateral depthwithin a range of a first distance between a first side wall and asecond side wall of the spacer at a level of a top surface of the bodystructure, and a second distance between the first side wall of thespacer and the gate side wall at the level of a top surface of the bodystructure, the first side wall of the spacer being closer to the gateside wall than the second side wall of the spacer.
 4. The method ofclaim 3, wherein: forming a spacer over the gate side wall comprises:forming a sealing layer on the gate side wall; and forming the spacer onthe sealing layer.
 5. The method of claim 3, wherein: forming a spacerover the gate side wall comprises: forming the spacer on the gate sidewall.
 6. The method of claim 1, wherein: forming a recess extensionunder the first recess comprises: anisotropic reactive ion etching thebody structure to form the recess extension.
 7. The method of claim 1,wherein: providing a body structure with a gate structure configuredthereon comprises: providing a substrate comprising the body structure;and forming the gate structure above the body structure.
 8. The methodof claim 7, wherein: forming a recess extension under the first recesscomprises: anisotropic dry etching the body structure; and anisotropicwet etching the body structure to form a profile of the recessextension.
 9. A method, comprising: providing a body structure with agate structure configured thereon, the body structure having a firstdoping concentration, and the gate structure comprising a gate sidewall; forming a spacer over the gate side wall; forming a first recessin the body structure by etching a portion of the body structure, thefirst recess being formed beside the spacer such that a surface of thespacer covered by the body structure is exposed, and the etched portionof the body structure having the first doping concentration; forming arecess extension under the first recess, including: forming a dummyspacer on the spacer; forming an etch rate control doping region in thebody structure under the first recess and beside the spacer; and etchingthe body structure to form the recess extension; and growing stressormaterial with a lattice constant different from that of the bodystructure such that the extended first recess is filled.
 10. The methodof claim 9, wherein the dummy spacer is free from covering a side wallof the first recess, and the first recess has a wall section under thespacer, a top of the wall section at least substantially extends to afirst side wall of the spacer at a level of a top surface of the bodystructure, and the first side wall of the spacer is closer to the gateside wall than a second side wall of the spacer.
 11. The method of claim10, wherein: at a level of a top surface of the body structure, the wallsection is located within a region between the surface of the spacerexposed by the first recess and the gate side wall.
 12. The method ofclaim 9, wherein: forming a spacer over the gate side wall comprises:forming a sealing layer on the gate side wall; and forming the spacer onthe sealing layer.
 13. The method of claim 9, wherein: forming a spacerover the gate side wall comprises: forming the spacer on the gate sidewall.
 14. The method of claim 9, wherein: providing a body structurewith a gate structure configured thereon comprises: providing asubstrate including the body structure; and forming the gate structureabove the body structure.
 15. The method of claim 10, wherein: at alevel of a top surface of the body structure, the wall section of thefirst recess possesses a distance from the gate side wall smaller thanor substantially equal to a distance of the second side wall of thespacer from the gate side wall.
 16. A method, comprising: providing asubstrate with a gate structure configured thereon, wherein the gatestructure comprises opposite side walls across a gate length of the gatestructure; forming a spacer over each of the side walls; forming arecess beside the spacer of each of the side walls, wherein the recessextends laterally under the spacer and vertically to a vertical depth;and growing stressor material with a lattice constant different fromthat of the substrate to fill the recess; wherein forming the recessbeside the spacer of each of the side walls comprises: etching thesubstrate until substantially reaching a lateral depth at leastextending to a first side wall of the spacer at a level of a top surfaceof the substrate to form a first recess, and the first side wall of thespacer being closer to the side walls of the gate structure than asecond side wall of the spacer; and forming a dummy spacer on thespacer; forming an etch rate control doping region in the substrateunder the first recess and beside the spacer to increase an etch rate ofthe etch rate control doping region.
 17. The method of claim 16, whereinthe dummy spacer is free from covering a side wall of the first recess,and: forming a recess beside the spacer of each of the side wallscomprises: anisotropic reactive ion etching the substrate to form therecess.
 18. The method of claim 16, wherein: forming a recess beside thespacer of each of the side walls comprises: anisotropic dry etching thesubstrate to extend the vertical depth; and anisotropic wet etching thesubstrate to form a profile of the recess.
 19. The method of claim 16,wherein: forming the spacer over each of the side walls comprises:forming a sealing layer on each of the side walls; and forming thespacer on the sealing layer.
 20. The method of claim 16, wherein:forming the spacer over each of the side walls comprises: forming thespacer on each of the side walls.